Large Area Plasma Processing System (LAPPS)

Agency/Department

FLC Region

Security Lab

No

Address

4555 Overlook Avenue S.W.
Washington

(P)

202-767-3083

Description

FUNCTION: Conducts research related to the production of plasmas, plasma characteristics, and the interaction of plasmas with materials. The research facility is aimed at developing a comprehensive understanding of plasma-based materials applications ranging from etching to deposition to surface activation.

DESCRIPTION: The laboratory has several chambers operating under both high and ultrahigh vacuum conditions. The systems have numerous access ports for plasma diagnostics and the ability to accomodate a range of materials processing approaches. Plasma production capabilities include RF-generated sources, magnetrons, and electron beams, including the NRLdeveloped Large Area Plasma Processing System (LAPPS), which can generate square meter plasma sheets with higher efficiency and better control than other techniques presently used in materials processing. The system shown above is one of the LAPPS chambers where a 1-3 kV electron beam, confined by a 100-300 G magnetic field along the axis, is used to produce plasma in a mixture of argon and nitrogen. A stage located inside the chamber, on which a material can be placed, is moved close to the plasma sheet for processing.

INSTRUMENTATION: A variety of plasma and particle collection diagnostics are used. These include Langmuir probes and biased charge collectors to measure plasma density, plasma potential, and temperature; a dual energy analyzer/quadrupole mass analyzer to identify particles and determine their energy; optical diagnostics to measure plasma temperature and composition; and a laser-induced fluorescence system for measuring local particle energies. Numerous transient recorders, power supplies, RF generators, digital multimeters, electrometers, and amplifiers are also available.

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