MEMS and Nano-Technology Clean Room

Agency/Department

FLC Region

Security Lab

No

Address

Redstone Arsenal
Redstone Arsenal, AL 35898-5000
United States

Description

The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors and systems. The clean room contains analysis and test equipment including a Scanning Electron Microscope and Probe Station. Devices developed and tested in this facility will be used for inertial and environmental sensor applications.

Technologies

No Technologies

Facilities

No Facilities

Equipment

No Equipment

Programs

No Programs

Funds

No Funds

Publications

No Publications

Awards

No Awards

News

No News

Successes

No Successes

Licenses

No Licenses