Nanofabrication Facility

Agency/Department

FLC Region

Security Lab

No

Address

Brookhaven National Laboratory Bldg. 735 P.O. Box 5000
Upton

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Laboratory Representative

(P)

(631) 344-4397

Description

The Nanofabrication Facility is housed in a class 100/1000 clean room (5,000 sq. ft) dedicated to state-of-the art patterning and processing of thin films, nanomaterials, and devices. The instrumentation in the facility has been optimized to provide maximum flexibility for its users, with capabilities to pattern a variety of materials over a wide range of size scales, from 10 nanometers to 10 millimeters. The clean room is utilized to fabricate devices for nanoelectronics, nanophotonics, biomedical engineering, photovoltaics, x-ray optics, nanomagnetics and beyond.

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