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Goniometric optical scatter instrument (GOSI) The bidirectional reflectance distribution function (BRDF) quantifies the angular distribution of light scattered from a surface as a function of wavelength, polarization state, and angle of incidence. The bidirectional characterization of optical...

The Telescope Calibration Facility (TCF) was designed to support the NIST Stars project by providing a facility to radiometricly calibrate long focal length instruments. The TCF consists of a source room, a 40-meter tunnel, and a 40-meter viewing hall. The source room contains a variety of laser...

Description: CORAL Names: Wet Deck Gen User 1, Wet Deck Gen User 2 This bench is used to etch and clean samples Specifications / Capabilities: 96" Open Wet Bench. Contains 4 dip tanks, 4 reflux quartz heated baths, glove rinse, DI and N2 spray guns, GFCI 120 VAC receptacle, and two safety eyewash...

Description: CORAL Name: Profilometer 1 This system is used to measure step hights by profilometry. Specifications / Capabilities: Up to 6" wafers Stylus force 1-15mg Tip radius sizes 0.7, 2.5, and 12.5 microns Scientific Opportunities / Applications: Surface characterization of MEMS,...

Description: CORAL Names: Gen. Wet Ox, Gen. Dry Ox, Sinter, Anneal This four stack furnace system is utilized to grow silicon dioxide, general anneal, and sinter. Specifications / Capabilities: 3", 4", and 6" wafers Maximum wafer thickness: 2.5 mm Silicon Wafers Allowed Pyrex and glass sides...

Description: Large "Truck" Chamber The large "truck" chamber provides controlled air conditions from -7 °C (20 °F) to 65 °C (150 °F). Air-Conditioner and Heat Pump Test Chambers The indoor chamber can provide controlled air conditions for all ARI heating and cooling tests for split-systems, window...

The Medical-Industrial Radiation Facility (MIRF) located in the RadiationPhysics Division of the NIST Physical Measurement Laboratory is a user facility for the medical and industrial radiation communities. The MIRF is based on a re-configured rf-powered, traveling-wave electron linac donated by...

Raman scattering is a powerful light scattering technique used to diagnose the internal structure of molecules and crystals. In a light scattering experiment, light of a known frequency and polarization is scattered from a sample. The scattered light is then analyzed for frequency and polarization...

Description: CORAL Name: SussMA6 This system utilizes 1X contact lithography to transfer photomask patterns onto substrates Specifications / Capabilities: UV broadmand (350 nm to 450 nm), I-line (365 nm) and G-line (436 nm) wavelengths available. Contact super-user for installing I-line or G-line...

Description: CORAL Name: E-Beam Evap 1 This is a dual e-beam/thermal evaporator for the deposition of metal and dielectric thin films. Materials available are: Ag, Al, Au, Co, Cr, Cu, Fe, Gd, Mo, Ni, Pd, Permalloy, Pt, Ta, Ti, W, Y, Yb, Al 2O 3, C, MgO, Si, SiO 2, TiO 2. Specifications /...

Description: In the artificial ultraviolet (UV) weathering of materials, a need exists for weathering devices that can uniformly illuminate test specimens with a high level of irradiance, and additionally provide capabilities such as mechanical loading. Developed under the auspices of the NIST...

NIST's mobile solar tracking facility is used to characterize the electrical performance of photovoltaic panels. It incorporates meteorological instruments, a solar spectroradiometer, a data acquisition system, and a single-channel photovoltaic curve tracer. Precision spectral pyranometers are used...

Cressington model 208 carbon coater.

Description: CORAL Name: AFM 2 A tool used to study the material surface characteristics, check the surface patterns generated by nanofabrication. It can take samples up to 200mm in diameter and 12mm in thickness. Specifications / Capabilities: Tapping mode; Contact mode; Phase mode Magnetic force...

Description: The FTA32 goniometer provides video-based contact angle and surface tension measurement. Contact angles are measured by fitting a mathematical expression to the shape of a drop and then calculating the slope of the tangent to the drop at the liquid-solid-vapor (LSV) interface line...

Description: CORAL Name: Critical Point Dryer This system utilizes CO 2to dry fragile suspended and floating structures Specifications / Capabilities: Wafer size up to 6" Scientific Opportunities / Applications: MEMS drying Membrane drying

Description: CORAL Name: ZEISS FIB This workstation combines Focused Ion Beam and Gemini Scanning Electron Microscope colums to enable the study of nanoscale-level materials and physical failure analysis in industrial production as well as state-of-the-art research in Nanotechnology, Materials and...

Description: CORAL Names: Wet Deck CMOS Station 1, Wet Deck CMOS Station 2 This bench is used to etch and clean samples Specifications / Capabilities: 72" Open Wet Bench. Contains 2 dip tanks, two reflux quartz heated baths, glove rinse, DI and N2 spray guns, GFCI 120 VAC receptacle, and two safety...

Description: CORAL Name: Wire Bonder Needs Description. Scientific Opportunities / Applications: Wedge bonder Semi-automatic and manual modes Independent Z-axis control, separate from X and Y axis control Force, power and time independently adjustable on each bond Auto step back with motorized Y...

Description: CORAL Name: ZEISS FESEM High performance research grade field emission SEM for imaging Specifications / Capabilities: Digital system with full function computer control Airlock Pieceparts to 150 mm wafers Secondary and backscattered electron detectors Images structures down to 10 nm in...

The NCNR backscattering spectrometer is one of the highest intensity instruments of its kind. It enables very high energy resolution studies of the low frequency dynamics of many systems. Applications of backscattering spectroscopy are numerous and include molecular reorientations, dynamics of...

Description: CORAL Name: Dicing Saw Need Description Specifications / Capabilities: Pieces up to 8" wafers Approved training required Scientific Opportunities / Applications: Full wafer dicing Auto cutting and semi-auto cutting modes Used to dice silicon, sapphire, ceramic, metals, Pyrex, glass,...

The LEAP 4000X is a three-dimensional atom probe microscope which provides nano-scale surface, bulk and interfacial materials analysis of structures with atom-by-atom identification and spatial positioning. The technique is based upon the principle of field evaporation, where a strong electric...

Description: CORAL Name: Unaxis Deep Si Etcher A tool for etching deep Si-trench by "Bosch" process on planar substrates up to 150mm in diameter Specifications / Capabilities: Etching of Silicon at rates from 1 μm/min to 15 μm/min Selectivity to SiO 2 ≥ 100 to 1 Selectivity to Photoresist≥ 40 to 1...

Description: CORAL Name: Laser Writer High resolution pattern generator for low volume mask making and direct writing. Specifications / Capabilities: 1x1 to 6x6 inch square masks 50 to 200mm wafer diameter Structures down to 0.6μm Address grid down to 25nm Top and back-side alignment Auto-focus...

Description: The Net-Zero Energy Residential Test Facility (NZERTF) is a unique laboratory at the National Institute of Standards and Technology (NIST), in Gaithersburg, Md. This facility, operated by the Energy and Environment Division in NIST's Engineering Laboratory , will allow researchers to...

Description: The 1-meter guarded hot-plate apparatus measures thermal conductivity of building insulation. This facility provides for absolute measurement of thermal resistance of thick and low-density test specimens used as transfer standards. These standards are used to calibrate heat-flow-meter...

NIST's PV characterization laboratory is used to measure the electrical performance and opto-electronic properties of solar cells and modules. This facility consists of a monochromator-based dual light source system, an LED-coupled integrating sphere source, a tabletop solar simulator with...

In order to accurately predict the annual energy production of photovoltaic systems for any given geographical location, building orientation, and photovoltaic cell technology, models are needed that can accurately predict the response of photovoltaic systems for a wide range of environmental...

The Standard Reference Photometer (SRP) Program began in the early 1980s as collaboration between NIST and the U.S. Environmental Protection Agency (EPA) to design, construct, certify, and deploy a network of identical ozone reference instruments. The design specifications called for an instrument...