Available Technology

Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump

An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.
Inventors: 

Hans

Jostlein

Patent Number: 
7,021,888
Patent Issue Date: 
April 4, 2006
Region
Midwest
State: 
Illinois
Phone: 
630-840-3000
Email: 
fermilab@fnal.gov
Lab Representatives
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