Available Technology

ELECTRON REFLECTOMETER AND PROCESS FOR PERFORMING SHAPE METROLOGY

An electron reflectometer includes: a sample stage; a source that produces source electrons; a source collimator; and an electron detector that receives collimated reflected electrons.

Inventors: 

Friedman Lawrence H., Wu Wen-Li

Patent Number: 
10,424,458
Internal Laboratory Ref #: 
17-026US1
Patent Issue Date: 
September 24, 2019
Lab Representatives
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