Available Technology

Fluid Platform for Transmission Electron Microscopy

This invention is a complete system comprising a novel chip and chip holder that enables routine, high-resolution imaging and spectroscopy of samples in liquids and high-pressure gases in the transmission electron microscope (TEM). The system overcomes limitations in liquid-layer thickness control that affect other liquid cells. It enables rapid switching of liquid chemistries. As a gas cell, it enables the use of high pressures for operating spectroscopy measurements and the use of chemistries not normally allowed in the TEM. The chip fabrication process is modular and flexible, allowing for rapid changes in design and customization for particular experiments. It is adaptable to optical microscopy and x-ray microscopy.

Patent Abstract: 

Vacuum Compatible Fluid Sampler
A fluid sampler includes: a sample cell that includes: a substrate comprising: a first port; a second port in fluid communication with the first port; a viewing reservoir in fluid communication with the first port and the second port and that receives the fluid from the first port and communicates the fluid to the second port, the viewing reservoir including: a first view membrane; a second view membrane; and a pillar interposed between the first view membrane and second view membrane, the pillar separating the first view membrane from the second view membrane at a substantially constant separation distance such that a volume of the viewing reservoir is substantially constant and invariable with respect to a temperature and invariable with respect to a pressure to which the sample cell is subjected.

Benefits 

 Integrated platform developed for in situ TEM liquid measurements  Robust and flexible process flow  Geometries readily optimized for a given measurement  Novel chromium oxide sacrificial layer developed  Inert, high-temperature compatible, extreme etch selectivity  Simple micro- to nanofluidic interface process  Sputter lift-off creates tapered profiles without greyscale lithography, etching  On-chip electrokinetic flow control developed  Rapid switching of liquid flows  High-speed flow possible

Inventors: 

J. Alexander Liddle, Samuel M.Stavis and Glenn E. Holland

Patent Number: 
10,639,634
Technology Type(s): 
Precision Measurement, Nanometrology, Atomic Spectroscopy
Internal Laboratory Ref #: 
16-032US1
Patent Issue Date: 
May 5, 2020
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