Available Technology

Video-Rate Scanned-Probe Microscope

Scanning Probe Microscopy (SPM) technology creates images of surfaces through use of a probe that scans a specimen, such as a semiconductor wafer or a biological sample. To craft a specimen image, SPM involves (a) mechanical movement of the probe to scan the specimen and (b) recording techniques to log probe-surface interaction as a function of position. Scanning a surface through conventional SPM methods, i.e. with AFM, can take a considerable amount of time to achieve high resolution levels.
This invention offers a system to provide high-speed scanning based on AFM techniques. One possible embodiment of the system features a flexure-based scanner driven by an electromagnetic shear-mode actuator. To achieve high scan rates, the flexure mechanism is driven at its resonant frequency. The actuator configuration relies on a stacked-coil design, which allows for the same type of coil to be used for actuation of both the fast-scan axis and the vertical surface-following axis. The mechanical design for the scanner includes a novel, two degree of freedom (DOF) method that allows each DOF to operate independently.
High-resolution imaging - High-speed scanning
David Trumper
Lab Representatives
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